Application(应用)

Metal Etching, DSP+  Liquid Film PR Stripper  Backside Etching

Thin Wafer Etching with Bernoulli Chuck

Performance(工艺）

PA adder, <10ea @ 0.2um  u% <3% of metal etching

SECS GEM, RMS, iEMS, FDC

Scheduler

Advantage(竞争优势)

>97% Chemical Recycle Rate  Max 4 chemicals in one chamber

Modularized Platform for 200/300mm Wafer

Safety(安全）

Semi S2/S6/F47 Certification

FM approval material and CO2 fire extinguisher  Interlock Matrix Control