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历史记录
Application(应用)
PR stripper、Nit Stripper Pre Clean 、 B-Clean Metal Removal
Post Ash Polymer Removal
Performance(工艺)
PA adder, <30ea @ 0.2um u% <8% of oxide etching SECS GEM, RMS, IEMS, FDC
Scheduler
Advantage(竞争优势)
Localized Software Team
Tech Covered for 100~300mm Process Needs Owned Tech of Cassette and Cassette-less Bench
Safety(安全)
Semi S2/S6/F47 Certification
FM approval material and CO2 fire extinguisher Interlock Matrix Control
Application(应用)
PR stripper、Nit Stripper Pre Clean 、 B-Clean Metal Removal
Post Ash Polymer Removal
Performance(工艺)
PA adder, <30ea @ 0.2um u% <8% of oxide etching SECS GEM, RMS, IEMS, FDC
Scheduler
Advantage(竞争优势)
Localized Software Team
Tech Covered for 100~300mm Process Needs Owned Tech of Cassette and Cassette-less Bench
Safety(安全)
Semi S2/S6/F47 Certification
FM approval material and CO2 fire extinguisher Interlock Matrix Control
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